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Tantalum Molybdenum (TaMo) Sputtering Target


材料类型 TaMo Target
元素符号 TaMo
原子量 3N5
原子序数 As request
颜色/外形 Planar,Disc,Rotary etc
热导率 1-3week W/m.K
熔点 Support Customize (°C)
沸点 Support (°C)
热膨胀系数 Semiconductors, display panels, optics, solar energy, and functional coatings /K
产品简介

Tantalum Molybdenum (TaMo) Sputtering Target Description:
Tantalum Molybdenum (TaMo) sputtering targets are high-performance binary alloy materials widely used for depositing high-performance barrier, protective, and high-temperature resistant thin films in advanced electronic, optical, and industrial applications. With excellent oxidation resistance, thermal stability, strong adhesion, low internal stress, and uniform film formation, TaMo binary alloys are ideal for high-durability functional coatings.

Common ratio:
TaMo 5/95, 10/90, 20/80, 40/60, 50/50, 60/40, 80/20, 90/10, 95/5 (wt% or at%) —— among them, Ta-20%Mo is a widely used ratio due to its balanced performance and cost advantage, and TaMo 10/90 is also commonly applied in flat-panel display related sputtering applications.

High-Temperature Protective Coatings
TaMo targets are commonly used to deposit oxidation and corrosion-resistant layers for cutting tools, engine components, and surface protection under extreme environments.

Semiconductor & Microelectronics
Applied as diffusion barrier layers, encapsulation films, and passivation coatings in integrated circuits, wafers, and electronic packaging.

Optical & Protective Films
Used for fabricating durable optical coatings, anti-reflection films, and hard protective layers with high thermal and mechanical stability.

Thin-Film Encapsulation & Barrier Materials
Suitable for gas barrier films, moisture-resistant coatings, and insulating layers in display and optoelectronic devices.

Research & Advanced Coating Development
Widely used in materials science, thin-film deposition, and high-performance coating research.

TaMo sputtering targets are compatible with DC and RF magnetron sputtering systems, ensuring stable deposition and high-quality thin films.

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