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Cobalt Aluminum (CoAl) Sputtering Target


材料类型 CoAl Target
元素符号 CoAl
原子量 2N5,3N,3N5
原子序数 As request
颜色/外形 Planar,Disc,Rotary etc
热导率 1-3week W/m.K
熔点 Support Customize (°C)
沸点 Support (°C)
热膨胀系数 Semiconductors, display panels, optics, solar energy, and functional coatings /K
产品简介

Cobalt Aluminum (CoAl) Sputtering Target Description:


Cobalt-aluminum (Co-Al) alloy targets are a type of specialized alloy target with a more defined application focus:

 the fabrication of high-performance thin film materials.


Cobalt-aluminum 82/18wt%

Cobalt-aluminum 1:2at%


The applications of cobalt-aluminum targets are highly concentrated in the microelectronics field, playing a crucial role, 

especially in advanced chip manufacturing:


Advanced semiconductor interconnects and barrier layers: This is the most cutting-edge and core application 

direction of cobalt-aluminum targets.


Furthermore, it may also be studied for use as metal gate electrodes in some special devices.


CoAl18wt%-3N-COA

CoAl18wt3N 800X600.jpg

Related Sputtering Targets


CoCr sputtering target


CoCrNi sputtering target


CoFeB sputtering target


CoCu sputtering target


CoFe sputtering target



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